RAFS003
Thermal Mass Flow Sensor Chip.
Overview
The RAFS003 thermal mass flow sensor chip provides a voltage output signal that is linearly correlated with mass flow rate.
The chip is manufactured using bulk silicon anisotropic etching technology to create a suspended membrane structure, which improves device response speed while reducing power consumption. Its thermistors are composed of platinum thin-film resistors with a positive temperature coefficient. When the target gas flows through the chip's sensing membrane area, the resistance changes in the upstream and downstream platinum resistors are measured and used to calculate the mass flow rate of the gas being tested.
Features
- Flow range: 0 to 80m/s
- Accuracy: ± 5%FS
- Fast response time: ≤ 15ms
- Temperature range: -40℃ to 125℃
Applications
Intake detection for automotive applications
Delivery form
- Singulated die on tape frame delivery
- 6-inch wafer (unsingulated) delivery