RS3000
Thermal Mass Flow Sensor Chip.
Overview
The RS3000 thermal mass flow sensor chip can provide a voltage output signal linearly related to the mass flow rate. The chip uses the bulk silicon anisotropic etching process to create a suspended membrane structure, which improves the device's response speed and reduces power consumption. The thermistor of the chip consists of platinum resistors with a positive temperature coefficient. The functionality of the RS3000 is based on the calorimetric measuring principle. The sensor element consists of a heater、upstream and downstream temperature sensors located next to the heater. The temperature difference between the upstream and downstream temperature sensors is flow-dependent and can therefore be used as a parameter for the flow.
The RS3000 thermal mass flow sensor chip adopts an independent IP design and has the characteristics of fast response time, high accuracy, high stability, and low power consumption.
Features
- Flow range: 0 to 80m/s
- Accuracy: ± 3%FS
- Fast response time: ≤ 15ms
- Temperature range: -40℃ to 125℃
- Higher accuracy and smaller die size
Applications
Intake detection for automotive applications
Delivery form
- Singulated die on tape frame delivery
- 6-inch wafer (unsingulated) delivery
- Loose singulated die delivery (Only for engineering sample)